Invention Grant
- Patent Title: Semiconductor structure manufacturing method and two semiconductor structures
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Application No.: US17496927Application Date: 2021-10-08
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Publication No.: US11887854B2Publication Date: 2024-01-30
- Inventor: Yuan Li
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Ladas & Parry LLP
- Priority: CN 2110049137.6 2021.01.14
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/285 ; H01L29/49

Abstract:
The present application provides a semiconductor structure manufacturing method and two semiconductor structures. The manufacturing method includes: providing a substrate and a silicon layer, the substrate exposing a top surface of the silicon layer; performing deposition to form an alloy layer on the silicon layer, the deposition being performed in a nitrogen-containing atmosphere, and a concentration of nitrogen atoms in the nitrogen-containing atmosphere increasing with an increase in deposition time; and annealing the alloy layer and the silicon layer. In embodiments of the present application, an increase in the concentration of nitrogen atoms can control a silicification reaction of the alloy layer, thereby preventing a line width effect and reducing the resistance of the semiconductor structure.
Public/Granted literature
- US20220223423A1 SEMICONDUCTOR STRUCTURE MANUFACTURING METHOD AND TWO SEMICONDUCTOR STRUCTURES Public/Granted day:2022-07-14
Information query
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