Invention Grant
- Patent Title: Adaptive focusing and transport system for electroplating
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Application No.: US18095680Application Date: 2023-01-11
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Publication No.: US11887874B2Publication Date: 2024-01-30
- Inventor: Arthur Keigler , David G. Guarnaccia , Freeman Fisher , Demetrius Papapanayiotou , Jonathan Haynes , Daniel L. Goodman
- Applicant: ASMPT NEXX, Inc.
- Applicant Address: US MA Billerica
- Assignee: ASMPT NEXX, INC.
- Current Assignee: ASMPT NEXX, INC.
- Current Assignee Address: US MA Billerica
- Agency: OSTROLENK FABER LLP
- The original application number of the division: US17584852 2022.01.26
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/68

Abstract:
A system and method for plating a workpiece are described. In one aspect, an apparatus includes a deposition chamber, a workpiece holder adapted for insertion into and removal from the deposition chamber, a shield with patterns of apertures corresponding to features on the workpiece, a shield holder also adapted for insertion into and removal from the deposition chamber and a positioning mechanism to position the workpiece in the workpiece holder such that the pattern of apertures on the shield will align with the corresponding features on the workpiece when the workpiece holder and shield holder are inserted into the deposition chamber.
Public/Granted literature
- US20230238260A1 ADAPTIVE FOCUSING AND TRANSPORT SYSTEM FOR ELECTROPLATING Public/Granted day:2023-07-27
Information query
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