Invention Grant
- Patent Title: Substrate storing container
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Application No.: US16981644Application Date: 2018-11-28
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Publication No.: US11887875B2Publication Date: 2024-01-30
- Inventor: Yuya Narita , Tadatoshi Inoue
- Applicant: MIRAIAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: MIRAIAL CO., LTD.
- Current Assignee: MIRAIAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: MUNCY, GEISSLER, OLDS & LOWE, P.C.
- International Application: PCT/JP2018/043857 2018.11.28
- International Announcement: WO2020/066039A 2020.04.02
- Date entered country: 2021-01-05
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673 ; H01L21/677

Abstract:
A substrate storing container includes: a container main body; a lid body that is attachable to and detachable from a container main body opening portion and can close the container main body opening portion; and a sealing member that closes the container main body opening portion together with the lid body, in which airtightness of the substrate storing space is enhanced so that 50% or more of a gas supplied to a substrate storing space can be discharged from an exhaust filter portion in a case in which a supply amount of a gas supplied from an outer space of the container main body to the substrate storing space through a gas supply filter portion is 22 liters per minute or less.
Public/Granted literature
- US20210111048A1 SUBSTRATE STORING CONTAINER Public/Granted day:2021-04-15
Information query
IPC分类: