Invention Grant
- Patent Title: Detachable biasable electrostatic chuck for high temperature applications
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Application No.: US16899750Application Date: 2020-06-12
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Publication No.: US11887878B2Publication Date: 2024-01-30
- Inventor: Shreesha Yogish Rao , Mukund Sundararajan , Cheng-Hsiung Matthew Tsai , Manjunatha P. Koppa , Steven V. Sansoni
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: MOSER TABOADA
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32

Abstract:
Embodiments of a substrate support are provided herein. In some embodiments, a substrate support for use in a substrate processing chamber includes a lower assembly having a base plate assembly, wherein the base plate assembly includes a plurality of electrical feedthroughs disposed about a central protrusion; a ceramic puck disposed on the lower assembly and removeably coupled to the base plate assembly, wherein the ceramic puck has an electrode disposed therein that is electrically coupled to first pair of electrical feedthroughs of the plurality of electrical feedthroughs; and a flexible connector having a spiral portion disposed between the ceramic puck and each of the plurality of electrical feedthroughs to allow for differences in thermal expansion of the ceramic puck and the base plate assembly.
Information query
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