Invention Grant
- Patent Title: Lithographic apparatus, substrate table, and non-uniform coating method
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Application No.: US17608238Application Date: 2020-04-21
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Publication No.: US11887881B2Publication Date: 2024-01-30
- Inventor: Bruce Tirri , Ping Zhou , Elizabeth Mary Stone , David Hart Peterson , Mehmet Ali Akbas , Ryan Mayer , Richard Bryan Lewis
- Applicant: ASML HOLDING N.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML HOLDING N.V.
- Current Assignee: ASML HOLDING N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- International Application: PCT/EP2020/061098 2020.04.21
- International Announcement: WO2020/224953A 2020.11.12
- Date entered country: 2021-11-02
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01L21/687 ; C23C16/513
Abstract:
A method of fabricating a substrate table includes supporting a table base and disposing a coating on a surface of the table base. The surface of the table base is substantially flat. The coating has a non-uniform thickness. The coating exerts a stress on the table so as to bend the table base. The non-uniform thickness causes a surface of the coating to become substantially flat after the bending.
Public/Granted literature
- US20220216092A1 LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING METHOD Public/Granted day:2022-07-07
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