Invention Grant
- Patent Title: Wafer-level heterogeneous dies integration structure and method
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Application No.: US18298379Application Date: 2023-04-11
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Publication No.: US11887964B1Publication Date: 2024-01-30
- Inventor: Shunbin Li , Weihao Wang , Ruyun Zhang , Qinrang Liu , Zhiquan Wan , Jianliang Shen
- Applicant: ZHEJIANG LAB
- Applicant Address: CN Hangzhou
- Assignee: ZHEJIANG LAB
- Current Assignee: ZHEJIANG LAB
- Current Assignee Address: CN Hangzhou
- Priority: CN 2210812604.0 2022.07.12
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L25/065 ; H01L23/498 ; H01L23/538 ; H01L23/00 ; H01L21/48 ; H01L21/56 ; H01L21/306

Abstract:
A wafer-level heterogeneous dies integration structure and method are provided. The integration structure includes a wafer substrate, a silicon interposer, heterogeneous dies, and a configuration substrate. A standard integration module is defined by the heterogeneous dies connected to the silicon interposer. The standard integration module is connected to an upper surface of the wafer substrate, and the configuration substrate is connected to a lower surface of the wafer substrate. The wafer substrate is connected to the configuration substrate via Through Silicon Vias on lower surface of the wafer substrate. And the upper surface of the wafer substrate is provided with Re-distributed Layers and a standardized micro bump array to form standard integration zone connected to the standard integration module.
Public/Granted literature
- US20240021578A1 WAFER-LEVEL HETEROGENEOUS DIES INTEGRATION STRUCTURE AND METHOD Public/Granted day:2024-01-18
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