Invention Grant
- Patent Title: Capacitor integrated in FinFET device and method for fabricating the same
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Application No.: US17520527Application Date: 2021-11-05
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Publication No.: US11887983B2Publication Date: 2024-01-30
- Inventor: Rui Pan , Jionghan Ye
- Applicant: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
- Current Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Alston & Bird LLP
- Priority: CN 2110153109.9 2021.02.04
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L27/06 ; H01L23/522 ; H01L29/66 ; H01L49/02 ; H01L29/78

Abstract:
The present application discloses a capacitor integrated in a FinFET. The capacitor and a resistor are both integrated in a middle-end-of-line process layer. A resistor main body layer and a resistor cover layer of the resistor and the forming regions of the intermediate dielectric layer and the lower electrode plate of the capacitor are patterned in a lithography process applying a first photomask; a forming region of an upper electrode plate is patterned in another lithography process applying a second photomask; the lower electrode plate, the upper electrode plate and the resistor main body layer are respectively connected with a metal zeroth layer. The present application further discloses a method for fabricating a capacitor integrated in a FinFET device. The disclosed method can reduce the process cost and improve the process efficiency, as well as flexibly select the capacitance of the capacitor by the process.
Public/Granted literature
- US20220246604A1 CAPACITOR INTEGRATED IN FINFET DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-08-04
Information query
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