Invention Grant
- Patent Title: X-ray sensor having a field limiting ring configuration
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Application No.: US17610383Application Date: 2019-05-14
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Publication No.: US11888015B2Publication Date: 2024-01-30
- Inventor: Mietek Bakowski Holtryd , Mats Danielsson , Cheng Xu
- Applicant: PRISMATIC SENSORS AB
- Applicant Address: SE Stockholm
- Assignee: Prismatic Sensors AB
- Current Assignee: Prismatic Sensors AB
- Current Assignee Address: SE Stockholm
- International Application: PCT/SE2019/050430 2019.05.14
- International Announcement: WO2020/231304A 2020.11.19
- Date entered country: 2021-11-10
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G01T1/24

Abstract:
Disclosed is an X-ray sensor having an active detector region including detector diodes on its surface. The X-ray sensor further includes a junction termination surrounding the surface region including the detector diodes. The junction termination includes a guard arranged closest to the end of the surface region, a field stop outside the guard and at least two field limiting rings, FLRs arranged between the guard and the field stop. A first FLR is arranged at a distance Δ1 from the guard selected from the interval [4 μm; 12 μm], a second FLR is arranged at a distance Δ2 from the first FLR selected from the interval [6.5 μm; 14 μm], and wherein the distance Δ2 is larger than the distance Δ1. The proposed technology also provides a method for constructing such an X-ray sensor and an X-ray imaging system including an X-ray detector system that includes such X-ray sensor.
Public/Granted literature
- US20220262844A1 X-RAY SENSOR HAVING A FIELD LIMITING RING CONFIGURATION Public/Granted day:2022-08-18
Information query
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