Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US17144176Application Date: 2021-01-08
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Publication No.: US11888054B2Publication Date: 2024-01-30
- Inventor: Ronghui Hao , Fu Chen , Chuan He , King Yuen Wong
- Applicant: Innoscience (Suzhou) Technology Co., Ltd.
- Applicant Address: CN Suzhou
- Assignee: INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.
- Current Assignee: INNOSCIENCE (SUZHOU) TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Suzhou
- Agency: JCIPRNET
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/66 ; H01L29/06 ; H01L29/207 ; H01L29/20 ; H01L29/417 ; H01L29/40 ; H01L29/205 ; H01L29/45

Abstract:
A nitride-based semiconductor device includes a buffer, a first nitride-based semiconductor layer, a shield layer, a second nitride-based semiconductor layer, S/D electrodes, and a gate electrode. A first nitride-based semiconductor layer is disposed over the buffer. A shield layer is disposed between the buffer and the first nitride-based semiconductor layer and includes a first isolation compound that has a bandgap greater than a bandgap of the first nitride-based semiconductor layer, in which the first isolation compound is made of at least one two-dimensional material which includes at least one metal element. A second nitride-based semiconductor layer is disposed on the first nitride-based semiconductor layer and has a bandgap less than the bandgap of the first isolation compound and greater than the bandgap of the first nitride-based semiconductor layer. The pair of S/D electrodes and the gate electrode are disposed over the second nitride-based semiconductor layer.
Public/Granted literature
- US20220199788A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-06-23
Information query
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