Invention Grant
- Patent Title: Interconnect landing method for RRAM technology
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Application No.: US17392555Application Date: 2021-08-03
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Publication No.: US11889705B2Publication Date: 2024-01-30
- Inventor: Hsia-Wei Chen , Chih-Yang Chang , Chin-Chieh Yang , Jen-Sheng Yang , Kuo-Chi Tu , Wen-Ting Chu , Yu-Wen Liao
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16108594 2018.08.22
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/528 ; H10B63/00 ; H10B10/10 ; H10B99/00 ; H10N70/00

Abstract:
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first interconnect within a first inter-level dielectric (ILD) layer over a substrate. A memory device is disposed over the first interconnect and is surrounded by a second ILD layer. A sidewall spacer is arranged along opposing sides of the memory device and an etch stop layer is arranged on the sidewall spacer. The sidewall spacer and the etch stop layer have upper surfaces that are vertically offset from one another by a non-zero distance. A second interconnect extends from a top of the second ILD layer to an upper surface of the memory device.
Public/Granted literature
- US20210366988A1 INTERCONNECT LANDING METHOD FOR RRAM TECHNOLOGY Public/Granted day:2021-11-25
Information query
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