Invention Grant
- Patent Title: Control method, storage medium, imprint method, and article manufacturing method
-
Application No.: US17326465Application Date: 2021-05-21
-
Publication No.: US11890791B2Publication Date: 2024-02-06
- Inventor: Shingo Ishida
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: ROSSI, KIMMS & McDOWELL LLP
- Priority: JP 20095697 2020.06.01
- Main IPC: B29C43/58
- IPC: B29C43/58 ; B29C59/00 ; B29C59/02 ; G03F7/00

Abstract:
A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate is provided. The method includes acquiring data that specifies a drop amount and a drop position on the substrate of each of droplets, calculating a spread of each of the droplets assuming that a spread shape of each of the droplets is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the mold to be filled with the formable material overlap, and correcting, based on a result of the calculation, the data so that the recessed portion is filled with the formable material.
Public/Granted literature
- US20210370558A1 CONTROL METHOD, STORAGE MEDIUM, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2021-12-02
Information query