Invention Grant
- Patent Title: Silica-based particle dispersion and production method therefor
-
Application No.: US17275970Application Date: 2019-10-04
-
Publication No.: US11891307B2Publication Date: 2024-02-06
- Inventor: Michio Komatsu , Kazuhiro Nakayama , Tetsuya Tanaka , Yuji Tawarazako , Tatsuya Mukai , Yuki Miwa
- Applicant: JGC CATALYSTS AND CHEMICALS LTD.
- Applicant Address: JP Kawasaki
- Assignee: JGC CATALYSTS AND CHEMICALS LTD.
- Current Assignee: JGC CATALYSTS AND CHEMICALS LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Oliff PLC
- Priority: JP 18192147 2018.10.10
- International Application: PCT/JP2019/039378 2019.10.04
- International Announcement: WO2020/075654A 2020.04.16
- Date entered country: 2021-03-12
- Main IPC: C01B33/193
- IPC: C01B33/193 ; C09G1/02 ; H01L21/321

Abstract:
A silica-based particle dispersion including a silica-based particle group and a high polishing rate and high surface precision is achieved to a silica-based substrate or a NiP-plated substrate to be polished or the like. A silica-based particle dispersion containing a group including irregularly-shaped and non-irregularly-shaped silica-based particles, wherein the irregularly-shaped silica-based particles each have a plurality of small holes thereinside and a covering silica layer which covers the core, and the silica-based particle group satisfies [1]-[3]. [1] Having an average particle size (D1) of 100-600 nm, and a particle size (D2) of 30-300 nm in terms of specific surface area. [2] An irregular-shape degree D (D=D1/D3) represented by the average particle size (D1) and a projected area-equivalent particle size (D3) being in the range of 1.1-5.0. [3] When waveform separation is performed on a volume-reference particle size distribution, a multi-peak distribution in which three or more peaks are detected.
Public/Granted literature
- US20220055908A1 SILICA-BASED PARTICLE DISPERSION AND PRODUCTION METHOD THEREFOR Public/Granted day:2022-02-24
Information query
IPC分类: