Invention Grant
- Patent Title: Mask and deposition apparatus including the same
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Application No.: US17748596Application Date: 2022-05-19
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Publication No.: US11891688B2Publication Date: 2024-02-06
- Inventor: Youngmin Moon , Jeongkuk Kim , Minho Moon , Ji-Hee Son , Seungyong Song , Areum Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: KILE PARK REED & HOUTTEMAN PLLC
- Priority: KR 20210097622 2021.07.26
- Main IPC: C23C16/04
- IPC: C23C16/04

Abstract:
A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.
Public/Granted literature
- US20230022195A1 MASK AND DEPOSITION APPARATUS INCLUDING THE SAME Public/Granted day:2023-01-26
Information query
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