Invention Grant
- Patent Title: Vibrating deposition device
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Application No.: US17696496Application Date: 2022-03-16
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Publication No.: US11891695B2Publication Date: 2024-02-06
- Inventor: Jing-Cheng Lin
- Applicant: SKY TECH INC.
- Applicant Address: TW Hsinchu County
- Assignee: SKY TECH INC.
- Current Assignee: SKY TECH INC.
- Current Assignee Address: TW Hsinchu County
- Agency: HDLS IPR SERVICES
- Agent Chun-Ming Shih
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44

Abstract:
The invention provides a vibrating deposition device, which includes a vacuum chamber, a fixed rod and a powder tank. The vacuum chamber includes an inner side surface, and a plurality of bulges and notches are arranged on the inner side surface. The fixed rod and the powder tank are arranged in an accommodating space of the vacuum chamber, wherein the powder tank is used for accommodating powders and contacts the inner side surface of the vacuum chamber through a protruding unit. When the vacuum chamber rotates, the protruding unit will be displaced between the bulge and the notch, and the powder tank will be displaced up and down relative to the vacuum chamber to vibrate powders in the powder tank, so that a uniform film will be formed on the surface of powders.
Public/Granted literature
- US20230295802A1 VIBRATING DEPOSITION DEVICE Public/Granted day:2023-09-21
Information query
IPC分类: