Invention Grant
- Patent Title: Semiconductor device manufacturing jig and method for manufacturing same
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Application No.: US17412173Application Date: 2021-08-25
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Publication No.: US11891713B2Publication Date: 2024-02-06
- Inventor: Takeyuki Suzuki
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee: Kabushiki Kaisha Toshiba,Toshiba Electronic Devices & Storage Corporation
- Current Assignee Address: JP Tokyo; JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JP 21027290 2021.02.24
- Main IPC: C25D17/06
- IPC: C25D17/06 ; C25D7/12 ; C25D17/00

Abstract:
A semiconductor device manufacturing jig for electroplating a substrate includes a conductive member. The substrate includes an inner part including a first surface, and an outer rim part surrounding the inner part. The outer rim part has a ring shape that protrudes further than the first surface in a direction perpendicular to the first surface. The conductive member causes a current to flow in the inner part by contacting a portion of the first surface of the inner part without contacting the outer rim part.
Public/Granted literature
- US20220267920A1 SEMICONDUCTOR DEVICE MANUFACTURING JIG AND METHOD FOR MANUFACTURING SAME Public/Granted day:2022-08-25
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