Invention Grant
- Patent Title: Paddle, processing apparatus having the paddle, and method of producing the paddle
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Application No.: US17177500Application Date: 2021-02-17
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Publication No.: US11891715B2Publication Date: 2024-02-06
- Inventor: Yasuyuki Masuda , Shao Hua Chang , Yoshitaka Mukaiyama , Masashi Shimoyama , Jumpei Fujikata
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP 20027004 2020.02.20
- Main IPC: C25D17/02
- IPC: C25D17/02 ; C25D21/10 ; B33Y80/00 ; B33Y50/02 ; B33Y10/00
Abstract:
A paddle capable of reducing an influence of blocking the electric field and capable of improving its mechanical strength is disclosed. The paddle, which is configured to agitate a processing liquid in a processing tank by moving in the processing tank, includes a plurality of agitating beams that form a honeycomb structure. The honeycomb structure has a plurality of hexagonal through-holes formed by the plurality of agitating beams.
Public/Granted literature
- US20210262111A1 PADDLE, PROCESSING APPARATUS HAVING THE PADDLE, AND METHOD OF PRODUCING THE PADDLE Public/Granted day:2021-08-26
Information query
