Invention Grant
- Patent Title: Imprint system, replica mold manufacturing apparatus, and article manufacturing method
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Application No.: US16794537Application Date: 2020-02-19
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Publication No.: US11892770B2Publication Date: 2024-02-06
- Inventor: Yosuke Murakami
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Carter, DeLuca & Farrell LLP
- Priority: JP 19043043 2019.03.08
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B29C33/38

Abstract:
An imprint system includes a replica mold manufacturing apparatus which manufactures a replica mold of a master mold by performing a first imprint process using the master mold, an imprint apparatus which performs a second imprint process using the replica mold, and a controller which controls a first imprint condition that is an imprint condition of the first imprint process and a second imprint condition that is an imprint condition of the second imprint process. The controller corrects the first imprint condition based on an overlay state between a pattern formed on a shot region by the second imprint process and the shot region.
Public/Granted literature
- US20200285146A1 IMPRINT SYSTEM, REPLICA MOLD MANUFACTURING APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2020-09-10
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