Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17695060Application Date: 2022-03-15
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Publication No.: US11894063B2Publication Date: 2024-02-06
- Inventor: Nayuta Kariya
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 21137150 2021.08.25
- Main IPC: G11C16/14
- IPC: G11C16/14 ; G11C16/04 ; G11C5/06 ; G11C16/26 ; H10B41/10 ; H10B41/27 ; H10B41/40 ; H10B43/10 ; H10B43/27 ; H10B43/40

Abstract:
A semiconductor memory device includes first conductive layers arranged in a first direction, a second conductive layer disposed at a position overlapping with the first conductive layers viewed from the first direction, a third conductive layer disposed at a position overlapping with the first conductive layers viewed from the first direction and arranged with the second conductive layer in a second direction intersecting with the first direction, a first semiconductor column opposed to the first conductive layers and the second conductive layer, a second semiconductor column opposed to the first conductive layers and the third conductive layer, and a fourth conductive layer disposed between the second conductive layer and the third conductive layer. The fourth conductive layer has a length in the second direction smaller than a length of the second conductive layer in the second direction and a length of the third conductive layer in the second direction.
Public/Granted literature
- US20230069251A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2023-03-02
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