Invention Grant
- Patent Title: Substrate transport apparatus
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Application No.: US18172128Application Date: 2023-02-21
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Publication No.: US11894252B2Publication Date: 2024-02-06
- Inventor: Robert T. Caveney , Ulysses Gilchrist , Alexander Krupyshev
- Applicant: Brooks Automation US, LLC
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation US, LLC
- Current Assignee: Brooks Automation US, LLC
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- The original application number of the division: US14568742 2014.12.12
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J9/04 ; B25J11/00

Abstract:
A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
Public/Granted literature
- US20230197493A1 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2023-06-22
Information query
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