Invention Grant
- Patent Title: Metal-insulator-metal capacitor having electrodes with increasing thickness
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Application No.: US17389273Application Date: 2021-07-29
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Publication No.: US11894297B2Publication Date: 2024-02-06
- Inventor: I-Che Lee
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L49/02 ; H01L27/08

Abstract:
Disclosed are metal-insulator-metal capacitors and integrated chips. In one embodiment, a metal-insulator-metal capacitor includes N electrodes and (N−1) passivation layers, wherein the N electrodes and the (N−1) passivation layers are alternately stacked on a substrate. N is an integer larger than 1. Thicknesses of the N electrodes gradually increase in a direction parallel to a normal direction of the substrate.
Public/Granted literature
- US20230030826A1 METAL-INSULATOR-METAL CAPACITOR AND INTEGRATED CHIP Public/Granted day:2023-02-02
Information query
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