Invention Grant
- Patent Title: Semiconductor memory device and method of manufacturing semiconductor memory device
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Application No.: US17380632Application Date: 2021-07-20
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Publication No.: US11894300B2Publication Date: 2024-02-06
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR 20200150833 2020.11.12 KR 20210022705 2021.02.19
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/00 ; H01L29/417 ; H10B43/27

Abstract:
Provided herein may be a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a source structure, a stacked conductive layer that overlaps with the source structure, a first select conductive layer and a second select conductive layer disposed between the source structure and the stacked conductive layer, a stacked insulating layer disposed between the first and second select conductive layers and the stacked conductive layer, and a separation insulating structure provided between the first select conductive layer and the second select conductive layer.
Public/Granted literature
- US20220148961A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-05-12
Information query
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