Invention Grant
- Patent Title: Staking nanosheet transistors
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Application No.: US17829330Application Date: 2022-05-31
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Publication No.: US11894383B2Publication Date: 2024-02-06
- Inventor: Pochun Wang , Guo-Huei Wu , Hui-Zhong Zhuang , Chih-Liang Chen , Li-Chun Tien
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT LAW
- Agent Anthony King
- The original application number of the division: US16927740 2020.07.13
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/84 ; H01L23/522 ; H01L23/528 ; B82Y10/00 ; H01L21/822 ; H01L21/8238 ; H01L29/66 ; H01L29/775 ; H01L21/768 ; H01L27/02 ; H01L27/06 ; H01L27/092 ; H01L29/423 ; H01L29/786 ; H01L21/74 ; H01L27/088 ; H01L21/8234

Abstract:
A semiconductor structure includes a first transistor, a second transistor, a first dummy source/drain, a third transistor, a fourth transistor, and a second dummy source/drain. The first transistor and a second transistor adjacent to the first transistor are at a first elevation. The first dummy source/drain is disposed at the first elevation. The third transistor and a fourth transistor adjacent to the third transistor, are at a second elevation different from the first elevation. The second dummy source/drain is disposed at the second elevation. The second transistor is vertically aligned with the third transistor. The first dummy source/drain is vertically aligned with a source/drain of the fourth transistor. The second dummy source/drain is vertically aligned with a source/drain of the first transistor. The gate structure between the second dummy source/drain and a source/drain of the third transistor is absent. A method for manufacturing a semiconductor structure is also provided.
Public/Granted literature
- US20220293638A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-09-15
Information query
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