Invention Grant
- Patent Title: Compact hyperspectral spectrometers based on semiconductor nanomembranes
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Application No.: US17189394Application Date: 2021-03-02
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Publication No.: US11894399B2Publication Date: 2024-02-06
- Inventor: Zhenqiang Ma , Zhenyang Xia , Ming Zhou , Qiaoqiang Gan , Zongfu Yu
- Applicant: Wisconsin Alumni Research Foundation , The Research Foundation for the State University of New York
- Applicant Address: US WI Madison
- Assignee: Wisconsin Alumni Research Foundation
- Current Assignee: Wisconsin Alumni Research Foundation
- Current Assignee Address: US WI Madison
- Agency: Bell & Manning, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G01J3/02 ; G01J3/28 ; H04N23/11

Abstract:
Hyperspectral resonant cavity imaging spectrometers and imaging systems incorporating the resonant cavity spectrometers are provided. The spectrometers include an array of photodetectors based on photosensitive semiconductor nanomembranes disposed between two dielectric spacers, each of the dielectric spacers having a thickness gradient along a lateral direction, such that the resonant cavity height differs for different photodetectors in the array.
Public/Granted literature
- US20220285411A1 COMPACT HYPERSPECTRAL SPECTROMETERS BASED ON SEMICONDUCTOR NANOMEMBRANES Public/Granted day:2022-09-08
Information query
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