Invention Grant
- Patent Title: Double-sided capacitor and fabrication method thereof
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Application No.: US17503607Application Date: 2021-10-18
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Publication No.: US11894419B2Publication Date: 2024-02-06
- Inventor: Yong Lu
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Ladas & Parry LLP
- Priority: CN 2010498454.1 2020.06.04
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H10N97/00 ; H01L23/522 ; H01L49/02

Abstract:
The present application relates to a fabrication method for a double-sided capacitor. The fabrication method for the double-sided capacitor includes the following steps: providing a substrate; forming a stack structure on the substrate; forming a capacitor hole in a direction perpendicular to the substrate to penetrate the stack structure, wherein the stack structure includes sacrificial layers and supporting layers alternately stacked; forming an auxiliary layer to cover the sidewall of the capacitor hole; forming a first electrode layer to cover the surface of the auxiliary layer; removing a part of the supporting layer on the top of the stack structure; removing the sacrificial layers and the auxiliary layer simultaneously along the opening; and forming a dielectric layer covering the surface of the first electrode layer and a second electrode layer covering the surface of the dielectric layer, wherein the gap is at least filled with the dielectric layer.
Public/Granted literature
- US20220037460A1 DOUBLE-SIDED CAPACITOR AND FABRICATION METHOD THEREOF Public/Granted day:2022-02-03
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