Invention Grant
- Patent Title: Memory and formation method thereof
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Application No.: US17386492Application Date: 2021-07-27
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Publication No.: US11894420B2Publication Date: 2024-02-06
- Inventor: Qiang Zhang , Zhan Ying
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN 1911087493.6 2019.11.08
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/762 ; H01L27/105 ; H10B99/00

Abstract:
A memory formation method includes: providing a substrate; forming a first mask layer on the substrate, in the first mask layer there being formed a plurality of parallel-arranged strip-shaped patterns positioned above the array area, and an end of each of the strip-shaped patterns being connected to the first mask layer on the peripheral area of the substrate; forming a second mask layer on the first mask layer, in the second mask layer there being formed a plurality of first patterns; and etching layer by layer by using the second mask layer and the first mask layer as masks to transfer the strip-shaped patterns and the first patterns into the substrate to form the discrete active areas arranged in an array.
Public/Granted literature
- US20210359084A1 MEMORY AND FORMATION METHOD THEREOF Public/Granted day:2021-11-18
Information query
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