- Patent Title: Amorphous metal oxide semiconductor layer and semiconductor device
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Application No.: US17851868Application Date: 2022-06-28
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Publication No.: US11894429B2Publication Date: 2024-02-06
- Inventor: Yoshiomi Hiroi , Shinichi Maeda
- Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 10166778 2010.07.26
- The original application number of the division: US16928070 2020.07.14
- Main IPC: H01L29/24
- IPC: H01L29/24 ; H01L21/02 ; H01L29/786 ; C04B35/626 ; C04B35/01 ; C04B35/453

Abstract:
Methods for producing the amorphous metal oxide semiconductor layer where amorphous metal oxide semiconductor layer is formed by use of a precursor composition containing a metal salt, a primary amide, and a water-based solution. The methodology for producing the amorphous metal oxide semiconductor layer includes applying the precursor composition onto a substrate to form a precursor film, and firing the film at a temperature of 150° C. or higher and lower than 300° C.
Public/Granted literature
- US20220328635A1 AMORPHOUS METAL OXIDE SEMICONDUCTOR LAYER AND SEMICONDUCTOR DEVICE Public/Granted day:2022-10-13
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