Holding member, irradiator, and plasma apparatus
Abstract:
An irradiator includes: a first electrode to which a voltage is applied for generating a plasma; and a holding member holding the first electrode; wherein: the holding member has a first member and a second member that are in contact with each other to constitute an accommodation space accommodating the first electrode; and a contact surface between the first member and the second member includes a non-perpendicular contact surface that is non-perpendicular to an axis of the first electrode.
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