Invention Grant
- Patent Title: Convertible plasma source and method
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Application No.: US17250953Application Date: 2020-08-05
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Publication No.: US11895763B2Publication Date: 2024-02-06
- Inventor: Jean-Sébastien Boisvert , Philip Wong , Valérie Léveillé
- Applicant: THE ROYAL INSTITUTION FOR THE ADVANCEMENT OF LEARNING/MCGILL UNIVERSITY , NEXPLASMAGEN INC.
- Applicant Address: CA Montréal
- Assignee: THE ROYAL INSTITUTION FOR THE ADVANCEMENT OF LEARNING/MCGILL UNIVERSITY,NEXPLASMAGEN INC.
- Current Assignee: THE ROYAL INSTITUTION FOR THE ADVANCEMENT OF LEARNING/MCGILL UNIVERSITY,NEXPLASMAGEN INC.
- Current Assignee Address: CA Montreal; CA Montreal
- Agency: LAVERY, DE BILLY, LLP
- Agent Gwendoline Bruneau
- International Application: PCT/CA2020/051067 2020.08.05
- International Announcement: WO2021/022371A 2021.02.11
- Date entered country: 2021-04-01
- Main IPC: H05H1/24
- IPC: H05H1/24 ; H01J37/32 ; H01J37/244

Abstract:
A plasma source comprising a first hollow electrode and a second hollow electrode separated by a gap and a dielectric barrier of a constant width; wherein the plasma source is configured to selectively produce a plasma in either one of a first configuration and a second configuration; wherein, i) in the first configuration, a plasma-forming gas flows in the gap while a non plasma-forming gas flows within the first hollow electrode; and ii) in the second configuration, a plasma-forming gas flows within the first hollow electrode and a non plasma-forming gas flows within the gap. The method comprises selecting at least two gases of different breakdown voltages, injecting a first gas in a first electrode separated from a second hollow electrode by a gas gap of a constant width, injecting a second gas in the gas gap under an applied power.
Public/Granted literature
- US20220353982A1 CONVERTIBLE PLASMA SOURCE AND METHOD Public/Granted day:2022-11-03
Information query
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