Invention Grant
- Patent Title: Vertical non-volatile memory devices having a multi-stack structure with enhanced photolithographic alignment characteristics
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Application No.: US17469469Application Date: 2021-09-08
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Publication No.: US11895827B2Publication Date: 2024-02-06
- Inventor: Giyong Chung , Youngjin Kwon , Dongseog Eun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR 20200181182 2020.12.22
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
A vertical-type nonvolatile memory device has a multi-stack structure with reduced susceptibility to mis-alignment of a vertical channel layer. This nonvolatile memory device includes: (i) a main chip area including a cell area and an extension area arranged to have a stepped structure, with the cell area and the extension area formed in a multi-stack structure, and (ii) an outer chip area, which surrounds the main chip area and includes a step key therein. The main chip area includes a first layer on a substrate and a second layer on the first layer. A lower vertical channel layer is arranged in the first layer. The step key includes an alignment vertical channel layer, and a top surface of the alignment vertical channel layer is lower than a top surface of the lower vertical channel layer.
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