Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17719990Application Date: 2022-04-13
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Publication No.: US11895828B2Publication Date: 2024-02-06
- Inventor: Jae Man Yoon , Jin Hwan Jeon , Tae Kyun Kim , Jung Woo Park , Su Ock Chung , Jae Won Ha
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T GROUP LLP
- Priority: KR 20210130237 2021.09.30
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
A semiconductor device and a method of fabricating the same are provided. According to the present invention, a semiconductor device comprises an active region formed in a substrate, and including flat surfaces and hole-shaped recess portions; upper-level plugs disposed over the flat surfaces; a spacer disposed between the upper-level plugs and providing a trench exposing the hole-shaped recess portions; a lower-level plug filling the hole-shaped recess portions; and a buried conductive line disposed over the lower-level plug and partially filling the trench.
Public/Granted literature
- US20230102043A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2023-03-30
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