Invention Grant
- Patent Title: Manufacturing method for memory and memory
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Application No.: US17600828Application Date: 2021-06-30
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Publication No.: US11895831B2Publication Date: 2024-02-06
- Inventor: Junchao Zhang , Tao Chen
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2011233641.3 2020.11.06
- International Application: PCT/CN2021/103863 2021.06.30
- International Announcement: WO2022/095482A 2022.05.12
- Date entered country: 2021-10-01
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/302 ; H01L29/66

Abstract:
A manufacturing method for memory includes: providing a substrate, and forming a first isolation layer and discrete bit lines on the substrate; removing part of the first isolation layer by a thickness to form discrete first trenches; forming word lines filling the first trenches, wherein the word lines each has a first side wall and a second side wall opposite to each other; forming discrete through holes each being between adjacent word lines; forming a first dielectric layer on surface of exposed first side wall, and forming a second dielectric layer on surface of exposed second side wall; and forming an active layer filling the through holes.
Public/Granted literature
- US20220352177A1 MANUFACTURING METHOD FOR MEMORY AND MEMORY Public/Granted day:2022-11-03
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