- Patent Title: Integrated circuitry comprising a memory array comprising strings of memory cells and methods including a method used in forming a memory array comprising strings of memory cells
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Application No.: US17348021Application Date: 2021-06-15
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Publication No.: US11895835B2Publication Date: 2024-02-06
- Inventor: Alyssa N. Scarbrough , Jordan D. Greenlee , John D. Hopkins
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B41/27 ; G11C5/06 ; H01L21/768 ; H01L23/538 ; G11C5/02

Abstract:
Integrated circuitry comprising a memory array comprises strings of memory cells comprising laterally-spaced memory blocks individually comprising a first vertical stack comprising alternating insulative tiers and conductive tiers. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The conductive tiers individually comprise a horizontally-elongated conductive line. A second vertical stack is aside the first vertical stack. The second vertical stack comprises an tipper portion and a lower portion. The upper portion comprises vertically alternating first tiers and second insulating tiers that are of different composition relative one another. The lower portion comprises an upper polysilicon-comprising layer, a lower polysilicon-comprising layer, an intervening-material layer vertically between the tipper and lower polysilicon-comprising layers. An upper intermediate layer is vertically between the upper polysilicon-comprising layer and the intervening-material layer. A lower intermediate layer is vertically between the lower polysilicon-comprising layer and the intervening-material layer. The lower intermediate layer and the upper intermediate layer comprise at least one of (a), (b), and (c), where (a): a hafnium oxide; (b): a bilayer comprising silicon nitride and comprising silicon dioxide positioned vertically relative one another, the silicon nitride in the bilayer being closer to the intervening-material layer than is the silicon dioxide in the bilayer; and (c): SiOxNy, where each of “x” and “y” is from 1 atomic percent to 90 atomic percent of the total of the Si, the O, and the N in the SiOxNy. Methods are disclosed.
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