Invention Grant
- Patent Title: Integration scheme for three terminal spin-orbit-torque (SOT) switching devices
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Application No.: US16592210Application Date: 2019-10-03
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Publication No.: US11895928B2Publication Date: 2024-02-06
- Inventor: Jesmin Haq , Tom Zhong , Luc Thomas , Zhongjian Teng , Dongna Shen
- Applicant: Headway Technologies, Inc.
- Applicant Address: US CA Milpitas
- Assignee: Headway Technologies, Inc.
- Current Assignee: Headway Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H10N52/01
- IPC: H10N52/01 ; G11C11/16 ; H10B61/00 ; H10N50/85 ; H10N52/00 ; H10N52/80 ; G11C11/18

Abstract:
A three terminal spin-orbit-torque (SOT) device is disclosed wherein a free layer (FL) with a switchable magnetization is formed on a Spin Hall Effect (SHE) layer comprising a Spin Hall Angle (SHA) material. The SHE layer has a first side contacting a first bottom electrode (BE) and an opposite side contacting a second BE where the first and second BE are separated by a dielectric spacer. A first current is applied between the two BE, and the SHE layer generates SOT on the FL thereby switching the FL magnetization to an opposite perpendicular-to-plane direction. The SHE layer is a positive or negative SHA material, and may be a topological insulator such as Bi2Sb3. A top electrode is formed on an uppermost hard mask in each SOT device. A single etch through the FL and SHE layer ensures a reliable first current pathway that is separate from a read current pathway.
Public/Granted literature
- US20210104663A1 Novel Integration Scheme for Three Terminal Spin-Orbit-Torque (SOT) Switching Devices Public/Granted day:2021-04-08
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