Invention Grant
- Patent Title: Heterogeneous fluoropolymer mixture polishing pad
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Application No.: US17472610Application Date: 2021-09-11
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Publication No.: US11897082B2Publication Date: 2024-02-13
- Inventor: Matthew R. Gadinski , Joseph So
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent Blake T. Biederman
- Main IPC: B24B37/24
- IPC: B24B37/24 ; H01L21/321 ; C08G73/10 ; G03F7/004 ; C08G18/28 ; C08G18/12 ; C08G18/48 ; C08G18/50 ; C08G18/76 ; C08G18/75 ; C08G18/72 ; H01L21/3105

Abstract:
The invention provides a polishing pad suitable for polishing at least one of semiconductor, optical, magnetic or electromechanical substrates. The polishing pad includes a polyurea polishing layer and a polyurea matrix. The polyurea matrix has a soft phase and a hard phase. The soft phase is formed from soft segments and the hard phase is formed from diisocyanate hard segments and a curative agent. The soft segment areva copolymer of aliphatic fluorine-free polymer groups and a fluorocarbon having a length of a least six carbons. The polyurea matrix is cured with the curative agent and includes gas or liquid-filled polymeric microelements. The soft segments form a fluorine rich phase that concentrates adjacent the polymeric microelements and at the polishing layer during polishing. The polishing layer remains hydrophilic during polishing in shear conditions.
Public/Granted literature
- US20230078023A1 HETEROGENEOUS FLUOROPOLYMER MIXTURE POLISHING PAD Public/Granted day:2023-03-16
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