Invention Grant
- Patent Title: Displacement meter, storage medium, manufacturing system, and method for manufacturing articles
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Application No.: US17720763Application Date: 2022-04-14
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Publication No.: US11900591B2Publication Date: 2024-02-13
- Inventor: Takayuki Uozumi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Carter, DeLuca & Farrell LLP
- Priority: JP 21074766 2021.04.27
- Main IPC: G06T7/60
- IPC: G06T7/60 ; H04N23/56 ; G06T7/00 ; G06V10/75 ; G01P3/38 ; G02B13/22

Abstract:
A displacement meter for suppressing errors occurring in sub-pixel estimation, comprising: alight source that illuminates an object; an image pickup unit for receiving diffused-reflected light from the object; and a calculation unit for calculating the a displacement amount of the object by using sub-pixel estimation and the cross-correlation function between reference image data and measurement image data, wherein an image acquired during a predetermined timing from the imaging unit serves as the reference image data and an image acquired during the next timing serves as the measurement image data, generates a correction displacement amount by subtracting a correction value from the displacement amount, sets the most recent measurement image data as the reference image data and sets a predetermined initial value as the correction value if the displacement amount meets a predetermined condition, and else sets the displacement amount obtained most recently as the correction value.
Public/Granted literature
- US20220343482A1 DISPLACEMENT METER, STORAGE MEDIUM, MANUFACTURING SYSTEM, AND METHOD FOR MANUFACTURING ARTICLES Public/Granted day:2022-10-27
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