- Patent Title: Processing chamber with optical fiber with bragg grating sensors
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Application No.: US16952884Application Date: 2020-11-19
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Publication No.: US11901165B2Publication Date: 2024-02-13
- Inventor: William J. O'Banion , An-Dien Nguyen , Huy D. Nguyen
- Applicant: iSenseCloud, Inc.
- Applicant Address: US CA San Jose
- Assignee: iSenseCloud, Inc.
- Current Assignee: iSenseCloud, Inc.
- Current Assignee Address: US CA San Jose
- Agent W. Eric Webostad
- The original application number of the division: US16036359 2018.07.16
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G02B6/02 ; G02B6/42 ; G01K11/3206 ; G01N29/24 ; G01N29/14 ; G01K1/14 ; G01J3/02 ; H01L21/687 ; H01S5/06 ; H01S5/068 ; H01S5/40 ; G01J3/18
Abstract:
An apparatuses relating generally to a test wafer, processing chambers, and method relating generally to monitoring or calibrating a processing chamber, are described. In one such an apparatus for a test wafer, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located over the platform. A layer of material is located over the platform and over the optical fiber.
Public/Granted literature
- US20210090865A1 PROCESSING CHAMBER WITH OPTICAL FIBER WITH BRAGG GRATING SENSORS Public/Granted day:2021-03-25
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