Invention Grant
- Patent Title: Magnetron sputtering apparatus and magnetron sputtering method
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Application No.: US17490574Application Date: 2021-09-30
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Publication No.: US11901166B2Publication Date: 2024-02-13
- Inventor: Tetsuya Miyashita , Kanto Nakamura , Yusuke Kikuchi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Fenwick & West LLP
- Priority: JP 20169360 2020.10.06
- Main IPC: H01J37/34
- IPC: H01J37/34 ; H01J37/32 ; C23C14/34

Abstract:
A magnetron sputtering apparatus is provided. The apparatus comprises: a vacuum chamber storing a substrate; a plurality of sputtering mechanisms, each including a target having one surface facing the inside of the vacuum chamber, a magnet array, and a moving mechanism for reciprocating the magnet array between a first position and a second position on the other surface of the target; a power supply for forming plasma by supplying power to targets of selected sputtering mechanisms for film formation; a gas supplier for supplying a gas for plasma formation into the vacuum chamber; and a controller for outputting a control signal, in performing the film formation, such that magnet arrays of selected and unselected sputtering mechanisms, extension lines of moving paths of the magnet arrays thereof intersecting each other in plan view, move synchronously or are located at certain positions so as to be distinct from each other.
Public/Granted literature
- US20220108880A1 MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD Public/Granted day:2022-04-07
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