Invention Grant
- Patent Title: Ion beam deposition target life enhancement
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Application No.: US17723005Application Date: 2022-04-18
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Publication No.: US11901167B2Publication Date: 2024-02-13
- Inventor: Sarpangala Hariharakeshava Hegde , Vincent C. Lee , Wei-Hua Hsiao , Joseph Barraco
- Applicant: Plasma-Therm NES LLC
- Applicant Address: US FL St. Petersburg
- Assignee: PLASMA-THERM NES LLC
- Current Assignee: PLASMA-THERM NES LLC
- Current Assignee Address: US FL St. Petersburg
- Agency: Burr & Forman LLP
- Agent Harvey S. Kauget
- Main IPC: C23C14/46
- IPC: C23C14/46 ; H01J37/34

Abstract:
The present disclosure provides a method for increased target utilization within a sputtering system. A plurality of targets are provided wherein each target is operatively connected to a central axis. An ion beam is generated within the sputtering system. The generated ion beam is directed at a first location of a first target for a first time period. Each target is moved by rotating the central axis. The generated ion beam is directed at a second location of the first target for a second time period.
Public/Granted literature
- US20230335383A1 ION BEAM DEPOSITION TARGET LIFE ENHANCEMENT Public/Granted day:2023-10-19
Information query
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