Invention Grant
- Patent Title: Carrier-assisted method for parting crystalline material along laser damage region
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Application No.: US17225384Application Date: 2021-04-08
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Publication No.: US11901181B2Publication Date: 2024-02-13
- Inventor: Matthew Donofrio , John Edmond , Hua-Shuang Kong , Elif Balkas
- Applicant: Wolfspeed, Inc.
- Applicant Address: US NC Durham
- Assignee: WOLFSPEED, INC.
- Current Assignee: WOLFSPEED, INC.
- Current Assignee Address: US NC Durham
- Agency: Dority & Manning, P.A.
- Main IPC: C30B33/02
- IPC: C30B33/02 ; H01L21/18 ; H01L21/20 ; B23K26/00 ; H01L21/02

Abstract:
A method for removing a portion of a crystalline material (e.g., SiC) substrate includes joining a surface of the substrate to a rigid carrier (e.g., >800 μm thick), with a subsurface laser damage region provided within the substrate at a depth relative to the surface. Adhesive material having a glass transition temperature above 25° C. may bond the substrate to the carrier. The crystalline material is fractured along the subsurface laser damage region to produce a bonded assembly including the carrier and a portion of the crystalline material. Fracturing of the crystalline material may be promoted by (i) application of a mechanical force proximate to at least one carrier edge to impart a bending moment in the carrier; (ii) cooling the carrier when the carrier has a greater coefficient of thermal expansion than the crystalline material; and/or (iii) applying ultrasonic energy to the crystalline material.
Public/Granted literature
- US20210225652A1 CARRIER-ASSISTED METHOD FOR PARTING CRYSTALLINE MATERIAL ALONG LASER DAMAGE REGION Public/Granted day:2021-07-22
Information query
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