Invention Grant
- Patent Title: Microelectronic devices, memory devices, and electronic systems
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Application No.: US17819019Application Date: 2022-08-11
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Publication No.: US11901292B2Publication Date: 2024-02-13
- Inventor: Shuangqiang Luo , Indra V. Chary
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/768 ; H01L21/311 ; H01L23/522 ; H10B41/27 ; H10B43/27

Abstract:
A microelectronic device comprises pillar structures comprising semiconductive material, contact structures in physical contact with upper portions of the pillar structures, and conductive structures over and in physical contact with the contact structures. Each of the conductive structures comprises an upper portion having a first width, and a lower portion vertically interposed between the upper portion and the contact structures. The lower portion has a tapered profile defining additional widths varying from a second width less than the first width at an uppermost boundary of the lower portion to a third width less than the second width at a lowermost boundary of the lower portion. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
Public/Granted literature
- US20220384342A1 MICROELECTRONIC DEVICES, MEMORY DEVICES, AND ELECTRONIC SYSTEMS Public/Granted day:2022-12-01
Information query
IPC分类: