Invention Grant
- Patent Title: Methods for forming three-dimensional memory devices with supporting structure for staircase region
-
Application No.: US17830250Application Date: 2022-06-01
-
Publication No.: US11901313B2Publication Date: 2024-02-13
- Inventor: Kun Zhang , Linchun Wu , Zhong Zhang , Wenxi Zhou , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/00 ; H01L25/18 ; H01L25/00 ; H10B41/27 ; H10B43/27

Abstract:
A three-dimensional (3D) memory device includes a core array region and a staircase region adjacent to the core array region. The core array region includes a memory stack having a plurality of conductor layers and a plurality of dielectric layers stacked alternatingly, a first semiconductor layer disposed over the memory stack, and a channel structure extending through the memory stack and the first semiconductor layer. The staircase region includes a staircase structure, a supporting structure disposed over the staircase structure, and a plurality of contacts contacting the plurality of conductor layers in the staircase structure. The first semiconductor layer overlaps the core array region in a plan view of the 3D memory device and the supporting structure overlaps the staircase region in the plan view of the 3D memory device.
Public/Granted literature
- US20220293533A1 METHODS FOR FORMING THREE-DIMENSIONAL MEMORY DEVICES WITH SUPPORTING STRUCTURE FOR STAIRCASE REGION Public/Granted day:2022-09-15
Information query
IPC分类: