Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
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Application No.: US18115709Application Date: 2023-02-28
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Publication No.: US11901447B2Publication Date: 2024-02-13
- Inventor: Guangtao Han
- Applicant: Joulwatt Technology Co., Ltd.
- Applicant Address: CN Hangzhou
- Assignee: JOULWATT TECHNOLOGY CO., LTD.
- Current Assignee: JOULWATT TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Hangzhou
- Agency: Treasure IP Group, LLC
- The original application number of the division: US17315351 2021.05.09
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/02 ; H01L21/265 ; H01L21/311 ; H01L29/08 ; H01L29/10 ; H01L29/66

Abstract:
Disclosed is a semiconductor device and a manufacturing method, comprising: forming a pad oxide layer and a silicon nitride layer on a substrate; etching the silicon nitride layer into a plurality of segments; forming an oxide layer, having an up-and-down wave shape, by performing a traditional thermal growth field oxygen method on the semiconductor device by use of the plurality of segments serving as forming-assisted structures; performing traditional processes on the semiconductor device having an up-and-down wavy semiconductor surface, to form a gate oxide layer, a polysilicon layer, and to form a source region and a drain region by implantation The semiconductor device having an up-and-down wavy channel region may be formed by a traditional thermal growth field oxygen method, thus the manufacturing processes are simple, the cost is low, and the completed device may have a larger effective channel width and a lower on-state resistance.
Public/Granted literature
- US20230207691A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2023-06-29
Information query
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