Invention Grant
- Patent Title: Transversely-excited film bulk acoustic resonator with partial BRAGG reflectors
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Application No.: US16819591Application Date: 2020-03-16
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Publication No.: US11901873B2Publication Date: 2024-02-13
- Inventor: Ventsislav Yantchev
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: ARENTFOX SCHIFF LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/17 ; H03H9/205 ; H03H9/64

Abstract:
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode in the diaphragm. A back-side partial Bragg reflector is formed on the back surface of the diaphragm, and a front-side partial Bragg reflector is formed on the front surface of the diaphragm.
Public/Granted literature
- US20200295729A1 TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH PARTIAL BRAGG REFLECTORS Public/Granted day:2020-09-17
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