Invention Grant
- Patent Title: Modulation device, control device, optical system, lithography system and method
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Application No.: US17583396Application Date: 2022-01-25
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Publication No.: US11901948B2Publication Date: 2024-02-13
- Inventor: Cornelius Richt , Mohammad Awad
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE 2019211477.6 2019.07.31
- Main IPC: H04B10/524
- IPC: H04B10/524 ; G02B27/28 ; H03K7/08

Abstract:
A modulation device includes: a signal splitter configured to generate: i) an M-bit wide partial signal comprising M more significant bits of an N-bit wide input signal; and ii) an L-bit wide partial signal comprising L less significant bits of the N-bit wide input signal, where L=N−M; a first modulation unit configured to generate a 1-bit wide pulse density modulation signal on the basis of the L-bit wide partial signal; a summation unit configured to generate an M-bit wide summation signal on the basis of the M-bit wide partial signal and the 1-bit wide pulse density modulation signal; and a second modulation unit configured to generate a 1-bit wide pulse width modulation signal on the basis of the M-bit wide summation signal.
Public/Granted literature
- US20220149950A1 MODULATION DEVICE, CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY SYSTEM AND METHOD Public/Granted day:2022-05-12
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