Invention Grant
- Patent Title: Automated application of drift correction to sample studied under electron microscope
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Application No.: US17585222Application Date: 2022-01-26
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Publication No.: US11902665B2Publication Date: 2024-02-13
- Inventor: Franklin Stampley Walden, II , John Damiano, Jr. , David P. Nackashi , Daniel Stephen Gardiner , Mark Uebel , Alan Philip Franks , Benjamin Jacobs , Joshua Brian Friend , Katherine Elizabeth Marusak , Nelson L Marthe, Jr. , Benjamin Bradshaw Larson
- Applicant: Protochips, Inc.
- Applicant Address: US NC Morrisville
- Assignee: Protochips, Inc.
- Current Assignee: Protochips, Inc.
- Current Assignee Address: US NC Morrisville
- Agency: NK Patent Law
- Main IPC: G01B11/16
- IPC: G01B11/16 ; H04N23/695 ; G06T7/33 ; G06T7/215 ; H01J37/20

Abstract:
Methods and systems for calibrating a transmission electron microscope are disclosed. A fiducial mark on the sample holder is used to identify known reference points so that a current collection area and a through-hole on the sample holder can be located. A plurality of beam current and beam area measurements are taken, and calibration tables are extrapolated from the measurements for a full range of microscope parameters. The calibration tables are then used to determine electron dose of a sample during an experiment at a given configuration.
Public/Granted literature
- US20220247934A1 AUTOMATED APPLICATION OF DRIFT CORRECTION TO SAMPLE STUDIED UNDER ELECTRON MICROSCOPE Public/Granted day:2022-08-04
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