Invention Grant
- Patent Title: Substrate heating unit, substrate processing apparatus, and substrate processing method
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Application No.: US17128159Application Date: 2020-12-20
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Publication No.: US11923213B2Publication Date: 2024-03-05
- Inventor: Tae Shin Kim , Young Dae Chung , Ji Hoon Jeong , Jee Young Lee , Won Geun Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20190175714 2019.12.26
- Main IPC: H01L23/00
- IPC: H01L23/00 ; B08B3/10 ; B23K26/00 ; B23K26/06 ; B23K26/064 ; B23K26/352 ; G02B7/02 ; G02B27/09 ; H01L21/02 ; H01L21/268 ; H01L21/66 ; H01L21/67 ; H01L21/687 ; B23K101/40 ; B23K103/00
Abstract:
Proposed is a substrate heating unit including: a laser generator providing a laser beam for heating a substrate; and a beam shaper processing the laser beam from the laser generator and selectively providing one of a first beam having a uniform energy distribution and a second beam having an edge-enhanced energy distribution to the substrate.
Public/Granted literature
- US20210202280A1 SUBSTRATE HEATING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD Public/Granted day:2021-07-01
Information query
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