- Patent Title: Packaging surface acoustic wave devices with conductive terminals
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Application No.: US17364242Application Date: 2021-06-30
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Publication No.: US11923817B2Publication Date: 2024-03-05
- Inventor: Li Ann Koo , Takashi Inoue , Vivian Sing Zhi Lee , Ping Yi Tan
- Applicant: Skyworks Solutions, Inc.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H03H3/08
- IPC: H03H3/08 ; B23K26/362 ; H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H9/25

Abstract:
Methods of making packaged surface acoustic wave devices are provided. The method may include forming a photosensitive resin coat over a cavity-defining structure encapsulating a surface acoustic wave device. The photosensitive resin coat may be formed using a spin-coating process, and then patterned to form a desired shape. Portions of the photosensitive resin may be removed from areas near the edge of the die, to facilitate separation of a wafer into individual dies. The method may also include forming a conductive structure using a plating process, where the conductive structure is located between the resin coat and the cavity defining structure. The photosensitive resin can include a phenol resin. The packaged surface acoustic wave devices made using a photosensitive resin coat may be relatively thin, and may have a height of less than 220 micrometers.
Public/Granted literature
- US20220006439A1 PACKAGING SURFACE ACOUSTIC WAVE DEVICES WITH CONDUCTIVE TERMINALS Public/Granted day:2022-01-06
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