Invention Grant
- Patent Title: MEMS transducer having a diaphragm made of polymer and method of producing same
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Application No.: US17618655Application Date: 2020-06-04
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Publication No.: US11924610B2Publication Date: 2024-03-05
- Inventor: Andrea Rusconi Clerici Beltrami , Ferruccio Bottoni , Nick Renaud-Bezot
- Applicant: USound GmbH
- Applicant Address: AT Graz
- Assignee: USound GmbH
- Current Assignee: USound GmbH
- Current Assignee Address: AT Graz
- Agency: Dority & Manning, P.A.
- Priority: DE 2019116080.4 2019.06.13
- International Application: PCT/EP2020/065468 2020.06.04
- International Announcement: WO2020/249457A 2020.12.17
- Date entered country: 2021-12-13
- Main IPC: H04R17/00
- IPC: H04R17/00 ; B81B3/00 ; B81C1/00 ; H04R7/04 ; H04R17/02 ; H04R31/00

Abstract:
A method for manufacturing a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength range and/or in the ultrasonic range, includes arranging at least one piezoelectric element on a support substrate. A diaphragm is formed on the at least one piezoelectric element. In forming the diaphragm, a flowable and curable polymer, which forms the diaphragm after curing, is at least partially cast around the at least one piezoelectric element. The invention further relates to the MEMS sound transducer formed by the method.
Public/Granted literature
- US20220360908A1 MEMS TRANSDUCER HAVING A DIAPHRAGM MADE OF POLYMER AND METHOD OF PRODUCING SAME Public/Granted day:2022-11-10
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