Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method thereof
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Application No.: US16934641Application Date: 2020-07-21
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Publication No.: US11925028B2Publication Date: 2024-03-05
- Inventor: Jae Taek Kim , Hye Yeong Jung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR 20200011206 2020.01.30
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/522 ; H01L23/528 ; H10B41/10 ; H10B41/40 ; H10B41/50 ; H10B43/10 ; H10B43/50 ; H10B63/00 ; H10B41/27 ; H10B43/27

Abstract:
A semiconductor memory device, and a manufacturing method of the semiconductor memory device, includes a peripheral transistor, a first insulating layer covering the peripheral transistor, a source layer on the first insulating layer, and a stack structure on the source layer. The semiconductor memory device also includes a peripheral contact structure penetrating the stack structure and the source layer, the peripheral contact structure being electrically connected to the peripheral transistor. The stack structure includes a stepped structure including a step side surface and a step top surface. The peripheral contact structure is in contact with the step side surface.
Public/Granted literature
- US20210242231A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-08-05
Information query
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