Invention Grant
- Patent Title: Embedded backside memory on a field effect transistor
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Application No.: US17217000Application Date: 2021-03-30
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Publication No.: US11925033B2Publication Date: 2024-03-05
- Inventor: Kuan-Liang Liu , Sheng-Chau Chen , Chung-Liang Cheng , Chia-Shiung Tsai , Yeong-Jyh Lin , Pinyen Lin , Huang-Lin Chao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/02 ; H01L21/285 ; H01L29/06 ; H01L29/45 ; H01L29/66 ; H01L29/786 ; H10B61/00

Abstract:
In some embodiments, the present disclosure relates to an integrated chip that includes a first and second transistors arranged over a substrate. The first transistor includes first channel structures extending between first and second source/drain regions. A first gate electrode is arranged between the first channel structures, and a first protection layer is arranged over a topmost one of the first channel structures. The second transistor includes second channel structures extending between the second source/drain region and a third source/drain region. A second gate electrode is arranged between the second channel structures, and a second protection layer is arranged over a topmost one of the second channel structures. The integrated chip further includes a first interconnect structure arranged between the substrate and the first and second channel structures, and a contact plug structure coupled to the second source/drain region and arranged above the first and second gate electrodes.
Public/Granted literature
- US20220320180A1 EMBEDDED BACKSIDE MEMORY ON A FIELD EFFECT TRANSISTOR Public/Granted day:2022-10-06
Information query
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